JPH0645931Y2 - レーザスキャニング光学系 - Google Patents

レーザスキャニング光学系

Info

Publication number
JPH0645931Y2
JPH0645931Y2 JP1989098620U JP9862089U JPH0645931Y2 JP H0645931 Y2 JPH0645931 Y2 JP H0645931Y2 JP 1989098620 U JP1989098620 U JP 1989098620U JP 9862089 U JP9862089 U JP 9862089U JP H0645931 Y2 JPH0645931 Y2 JP H0645931Y2
Authority
JP
Japan
Prior art keywords
scanning
lens
scanner
optical system
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989098620U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0337413U (en]
Inventor
朗 上原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1989098620U priority Critical patent/JPH0645931Y2/ja
Publication of JPH0337413U publication Critical patent/JPH0337413U/ja
Application granted granted Critical
Publication of JPH0645931Y2 publication Critical patent/JPH0645931Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
JP1989098620U 1989-08-23 1989-08-23 レーザスキャニング光学系 Expired - Lifetime JPH0645931Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989098620U JPH0645931Y2 (ja) 1989-08-23 1989-08-23 レーザスキャニング光学系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989098620U JPH0645931Y2 (ja) 1989-08-23 1989-08-23 レーザスキャニング光学系

Publications (2)

Publication Number Publication Date
JPH0337413U JPH0337413U (en]) 1991-04-11
JPH0645931Y2 true JPH0645931Y2 (ja) 1994-11-24

Family

ID=31647704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989098620U Expired - Lifetime JPH0645931Y2 (ja) 1989-08-23 1989-08-23 レーザスキャニング光学系

Country Status (1)

Country Link
JP (1) JPH0645931Y2 (en])

Also Published As

Publication number Publication date
JPH0337413U (en]) 1991-04-11

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